Decorative

Applications

Deposition

Enhancing process efficiency

Deposition stages have an essential role in advanced coating and thin-film generation systems. This is because they both enhance process efficiency and promote greater substrate coverage as well. Deposition stages are also capable of manipulating substrates in a variety of ways under processing conditions.

Our range of options

At UHV Design, we have a range of options when it comes to deposition stages. This includes everything from heater modules that can be incorporated into a system right through to our own heater stages. The latter provide deposition height adjustment, substrate rotation, biasing, heating and cooling.

Substrate Heater Modules

Our heater modules are used in vacuum applications for radiantly heating semiconductor wafers, holder supported samples or various other substrates to high temperatures. The modules feature CVD processed heating elements, packaged in refractory metal cases.

View category

Key features

  • High uniformity heating to 1200°C
  • Elements with a large radiating surface to gap ratio, allowing them to run at lower temperatures than conventional metal heaters
  • Refractory metal hot zone for uncompromised performance at high temperatures

Substrate Heater Stages

The EpiCentre range of deposition stages provide high temperature, uniform and durable substrate heating and precise manipulation - all under true UHV conditions. EpiCentres have been designed for deposition applications such as MBE (Molecular Beam Epitaxy), sputtering and CVD (Chemical Vapour Deposition). Substrate annealing and degassing. However, other high-temperature material modifications can also be performed.

View category

Key features

  • High uniformity substrate heating to 1200°C
  • RF & DC substrate biasing with ultra-stable plasma
  • Substrate rotation to 60rpm
  • Modular design allows application-specific configuration
  • Substrate sizes up to 8"
  • Choice of in-line and right-angle configurations
  • Transfer Arms
  • Secure sample transfer with high-performance magnetically-coupled transfer arms
  • Extensive range to transfer specific industry-standard sample holders using a variety of actuation methods
  • Standard transfer lengths up to 1,219mm
  • Custom options are also available

If you would like to discuss your project with our engineering team, please contact us.

Other applications

Particle Accelerators

Particle Accelerators

Read more

Production Environments

Production Environments

Read more

Surface Science

Surface Science

Read more