3-axis Rotary Telescopic Transfer Arm
360° rotation, 760mm linear extension and 50mm Z motion
The 3-axis RTTA provides a cost-effective radial distribution solution for applications that require arm rotation, arm extension and arm lift and lower for sample transfer. It provides 360° rotation, 760mm linear extension and 50mm Z motion. Typically, it enables <1mm deflection at full arm extension with a 10N load. This transfer arm has linear reproducibility of <0.2mm and rotational reproducibility of <0.2mm. Motorisation options are also available.
Key Specifications
- 760mm extension
- Typically <1mm deflection at full extension under 10N load
- Rotational reproducibility <0.2mm
- Linear reproducibility <0.2mm
- Clean, UHV performance
- Competitively priced compared to conventional designs
How it works
- A high torque magnetically-coupled MagiDrive provides arm rotation, aligning with the desired chamber port
- A second MagiDrive is used to drive the innovative telescopic mechanism. This provides an arm extension of 760mm and transports the sample in and out of the desired satellite chamber
- A linear shift mechanism is used to provide a 50mm lift/lower of the sample arm for gravity-based sample handoff. This is typically used on our MBE, sputtering and CVD sample manipulators and heating stages
- The 3-axis RTTA can be fully motorised using stepper or SMART motors. Alternatively, the RTTA can be configured to accept any standard NEMA23 frame motor
Product configuration tool
Technical Specification
MODEL | RTTA 2-Axis |
Mounting Flange | CF100 152mm (6") OD CF |
Min radial port flange size for arm | CF100 152mm (6") OD CF (Arm lift dependent on radial port ID) |
Min radial port flange size for max arm lift/lower of 50mm | CF150 203mm (8") OD CF and 150mm bore |
Min radial port size and clear bore required for assembly installation | CF150 203mm (8") OD CF and 150mm bore |
Rotation motion | Unlimited manual and +/-180° motorised |
Minimum chamber ID | 640mm (contact us for detailed installation requirements) |
Minimum chamber free height | 152mm |
Arm lift motion stroke | 50mm (48mm if motorised) |
Arm extension | 760mm |
Arm extension from port of 640mm ID chamber | 678mm |
Arm stiffness at full extension | Typically <1mm deflection with 10N load |
Rotational reproducibility | 0.2mm at full extension |
Bakeout temperature | 250°C (with motors removed) |
If you would like to discuss your project with our engineering team, please contact us.